Перегляд за автором "Farenik, V.I."

Сортувати за: Порядок: Результатів:

  • Development of arc suppression technique for reactive magnetron sputtering 
    Dudin, S.V.; Farenik, V.I.; Dahov, A.N.; Walkowicz, J. (Физическая инженерия поверхности, 2005)
    The technique of arc suppression on the target surface of magnetron sputtering system during reactive deposition of Al₂O₃ coatings has been developed. Damping of arcs is achieved by transient polarity change of the ...
  • Experimental research of ICP reactor for plasma-chemical etching 
    Dudin, S.V.; Zykov, A.V.; Dahov, A.N.; Farenik, V.I. (Вопросы атомной науки и техники, 2006)
    The results of systematic experimental researches of plasma-chemical etching reactor in the inductive mode are presented in this paper. Measurements of the integral discharge parameters (inductor voltage, gas pressure, ...
  • Formation stages of pulsed discharge in oxygen and carbon tetrafluoride 
    Lisovskiy, V.A.; Ogloblina, P.A.; Dudin, S.V.; Yegorenkov, V.D.; Dakhov, A.N.; Farenik, V.I. (Журнал физики и инженерии поверхности, 2016)
    This paper reports the current and voltage oscilloscope waveforms of a pulsed discharge measured in a broad range of frequencies (from 20 to 300 kHz) and duty cycle from 0.15 to 0.85 for two values of oxygen and carbon ...
  • Integral cluster set-up for complex compound composites syntesis 
    Yakovin, S.D.; Dudin, S.V.; Zykov, A.V.; Farenik, V.I. (Вопросы атомной науки и техники, 2011)
    At present study the result of development and investigations of cluster technological set-up for synthesis of complex compound composites is demonstrated. The present set-up consist of complimentary DC-magnetron ...
  • Spatial distributions of plasma parameters in ICP reactor 
    Dudin, S.V.; Dahov, A.N.; Farenik, V.I. (2010)
    The results of systematic experimental researches of ICP reactor are presented. Experimental results on spatial distribution of local plasma parameters (plasma density, temperature and electron energy distribution function) ...
  • The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure 
    Zykov, A.V.; Polozhiy, K.I.; Farenik, V.I. (Вопросы атомной науки и техники, 2003)
    The combined inductive-capacitive RF discharge at low gas pressure is considered for a case of collisionless ion motion. The power distribution model in the combined RF discharge in case of two asymmetric RF electrodes is ...
  • The Langmuir probe modeling in ion-beam plasma 
    Antonova, T.N.; Dudin, S.V.; Farenik, V.I. (Вопросы атомной науки и техники, 2003)
    The mathematical model of single cylindrical Langmuir probe describing dependence of ion current gathered by the probe on the basic parameters of ion-beam plasma, such as probe potential, cold and beam ion densities, ...